The size- and fluorescence-based sorting of micro- and nano-scale particlessuspended in fluid presents a significant and important challenge for bothsample analysis and for manufacturing of nanoparticle-based products. Here wedemonstrate a disposable microfluidic particle sorter that enableshigh-throughput, on-demand counting and binary sorting of sub-micron particlesand cells, using either fluorescence or an electrically-based determination ofparticle size. Size-based sorting uses a resistive pulse sensor integratedon-chip, while fluorescence-based discrimination is achieved using on-the-flyoptical image capture and analysis. Following detection and analysis, theindividual particles are deflected using a pair of piezoelectric actuators,directing the particles into one of two desired output channels; the main flowgoes into a third waste channel. The integrated system can achieve sortingfidelities of better than 98\%, and the mechanism can successfully count andactuate, on demand, more than 60,000 particles/min.
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